From the world leader in analytical instruments, a suite of metrology tools for production development and process control, ESD and Latch-Up simulators to ensure reliability in ICs from 256-1024 pins, precision liquid temperature control systems engineered for demanding production environments, and products for plant environment monitoring.

A premier provider of parallel angle resolved XPS systems for ultra-thin film thickness and chemical state mapping, Thermo Fisher Scientific offers the Theta 300 for the analyzes 300 mm wafers. 

>>Theta 300 Applications

The use of FT-IR spectrometry for the determination of oxygen and carbon levels in silicon is rapid, precise, non-destructive, non-contact and relatively inexpensive. These determinations can be performed with little knowledge of the theory of the instrument involved. Download PDF.

Maximize productivity of your instrument: 

• Chromatography
• Mass Spectrometry
• Elemental Analysis
• Molecular Spectroscopy

>> More Information

• FT-IR Wafer Metrology
• Microbeam XRF 
• X-ray Microanalysis
• Sector Field ICP-MS 
• Angle Resolved XPS 
• Raman Microspectroscopy
• ESD & Latch-Up Simulation
• Temperature Control
• CID Cameras and Imaging