Microbeam XRF
Microbeam X-ray Fluorescence is a revolutionary new approach to film thickness determination. Using a focused x-ray beam energy source, Microbeam XRF measures the thickness and composition of up to six layers of deposited metals simultaneously, from angstrom to micron thickness ranges.
A unique combination of microbeam X-ray technology and traditional EDXRF provides a non-contact, non-destructive technique ideally suited to metallic plating and thin-film measurements.
The MicroXR benchtop platform establishes a baseline range of collimation, detection and sample handling options.
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Thermo Fisher Scientific's console platform microbeam XRF system provides the size and scalability for even the most demanding film thickness measurement and composition application challange.
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This platform combines the industry?s most precise microbeam XRF console with industry-compatible automated sample handling options. Designed for high speed measurements of metallic films in production environments, the wafer handler platform provides the ultimate in accuracy, precision, and reproducibility.
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