EX11000 Flexible Automated Simulator for ESD and Latch-Up Testing
The Thermo Scientific EX11000 is an advanced component reliability tester designed for engineering studies and reliability testing. The base system is configured for 144 pins and is expandable in 48 pin increments up to 2016 pins. The ESD pulse system uses a combination of robotic motion and relay matrix to deliver textbook quality ESD waveforms without the parasitic effects that are common in automatic testers.
Product Detail
The base system includes one bias supply with a range of up to 200V/0.75A and options for up to seven supplies. The high accuracy curve trace capability is provided by a source meter with range from microvolt to 200V and Pico compress to 1A. Failure criteria include single point and envelope methods based on user-defined values. The sophisticated operating software allows the user to operate the system in a manual mode, MIL-STD mode or create complex test routines as required for research and development work. The operating software also includes self test routines for the relay matrix section, high voltage and bias power supplies and other primary system functions.
The ESD capability includes HBM waveform pulses of up to 8kV or options to 12kV. The MM pulse is up to 1kV or options to 2kV.
Waveform pulse networks are easily changed in a matter of minutes. As an option, testers can be equipped with dual (HBM and MM) pulse heads to allow switching from one test type to the other without changing pulse heads. Special waveform pulse heads (i.e. cable discharges are available).
The Latch-up test capability of the Thermo Scientific EX11000 is the most advanced available. Fully compliant with the JESD78 or 78A test methods, the system offers all of the features required for testing the most complex device. The base system includes a clock synchronous with the vector rate and pin logic comparators to confirm the status of each pin. Logic vectors of up to 32K depth are applied to user-selected pins at defined rates of up to 2 MHz. In addition, the multiple bias supplies may be operated in a Power Supply Sequencing Mode with user defined turn on sequence and delay times. Special capabilities (i.e. Transient Latch-up) are available.
Pulser Discharge Distribution method: Hybrid of relay matrix and mechanical switching with pogo pin contacts. Typically one mechanical switching motion made for each 24 pins tested
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Pulsers are available for HBM, MM or combined HBM and MM
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12kV HBM, CDE and custom requirements
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HBM from 50V to 8,000V in 10 Voltages
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MM from 25V to 1,000V in 5 Voltages
Latch-Up :
Testing to JEDEC 78 and 78A
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Up to 7 bias supplies with on-off order sequencing and delays
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Modular bias supply choices from 8V at 16V to 200V at 0.75A
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High speed parallel bias supply current measurements quickly determine LU state with auto-ranging or present scales
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Preconditioning logic vector generation with individual direct pin 15 drivers
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Standard logic level programmable from 2 to 6V or from 1 to 5V in 0.1 steps
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Vector depth is 32,768 with full monitoring for read-back verification at 1 or 2MHz step rates
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Real time verification at 1MHz steps
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Asynchronous clock of up to 50MHz optional with direct test fixture board connection
Curve Trace :
High accuracy Kiethley 2400 Source Meter Unit
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Two ranges: 0 to ±20 at 1A and 0 to ±200V at 0.1A
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Five digit resolution measurements with automatic ranging
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Current measurements down to 0.001µA
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User selectable failure modes: open/short circuit; curve trace envelope; User defines percentage shift at a selected leakage measurement points