SURF-CAL Particle Size Standards
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  SURF-CAL Particle Size Standards


SURF-CAL is designed to simplify the job of preparing calibration wafers in your facility. Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

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Thermo Fisher Scientific, along with the Semiconductor Industry and SEMI have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers the SURF-CAL™ product line was created to meet SEMI standard guidelines.  Available are sizes considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS)1.


By depositing SURF-CAL NIST traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations. You can also assess the performance of your SSIS at critical stages in the manufacturing process.

All products are suspended in deionized, filtered water in 50 mL bottles at a concentration of 3 x108particles per mL. Products, PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Measurement Methodology:

To assure direct traceability to NIST, the certified diameters of these products were transferred by transmission electron or optical microscopy from NIST standard reference materials2. The uncertainty was calculated per the NIST Technical Note 1297, 1994 Edition "Guidelines for Evaluating and Expressing the Uncertainty of NIST Measurement Results"4. The uncertainty listed is the expanded uncertainty with a coverage factor of two (K=2). The peak diameter was calculated using approximately the ± 2s range of the particle size distribution. The size distribution was calculated as the standard deviation of the whole peak. The Coefficient of Variation is one standard deviation expressed as a percentage of the peak diameter. The FWHM distribution was calculated as the distribution at half of the peak height expressed as a percentage of the peak diameter.

1. "The National Technology Roadmap for Semiconductors", Semiconductor Industry Association (1999)

2. S.D. Duke and E.B. Layendecker, "Internal Standard Method for Size Calibration of Sub-Micron Spherical Particles by Electron Microscopy", Fine Particle Society (1988)

3. SEMI M52 — Guide for Specifying Surface Inspection Systems for Silicon Wafers the 130 nm Technology Generation.

4. Barry N. Taylor and Chris E. Kuyatt, "Guidelines for Evaluating and Expressing the Uncertainty of NIST Measurement Results". NIST Technical Note 1297, 1994 edition, September 1994.
 SURF-CAL Particle Size Standards
 PRODUCT# Price  Certified Peak Diameter  Particles per mL  
         
 PD-047      -    0.047 μm 3 x 108   SELECT  
 PD-047B      -    0.047 μm 1010   SELECT  
 PD-064      -    0.064 μm 3 x 108   SELECT  
 PD-064B      -    0.064 μm 1010   SELECT  
 PD-070      -    0.072 μm 3 x 108   SELECT  
 PD-070B      -    0.072 μm 1010   SELECT  
 PD-080      -    0.080 μm 3 x 108   SELECT  
 PD-080B      -    0.080 μm 1010   SELECT  
 PD-083      -    0.083 μm 3 x 108   SELECT  
 PD-083B      -    0.083 μm 1010   SELECT  
 PD-090      -    0.089 μm 3 x 108   SELECT  
 PD-090B      -    0.089 μm 1010   SELECT  
 PD-092      -    0.092 μm 3 x 108   SELECT  
 PD-092B      -    0.092 μm 1010   SELECT  
 PD-100      -    0.100 μm 3 x 108   SELECT  
 PD-100B      -    0.100 μm 1010   SELECT  
 PD-110      -    0.114 μm 3 x 108   SELECT  
 PD-110B      -    0.114 μm 1010   SELECT  
 PD-125      -    0.126 μm 3 x 108   SELECT  
 PD-125B      -    0.126 μm 1010   SELECT  
 PD-155      -    0.155 μm 3 x 108   SELECT  
 PD-155B      -    0.155 μm 1010   SELECT  
 PD-180      -    0.184 μm 3 x 108   SELECT  
 PD-180B      -    0.184 μm 1010   SELECT  
 PD-200      -    0.202 μm 3 x 108   SELECT  
 PD-200B      -    0.202 μm 1010   SELECT  
 PD-204      -    0.204 μm 3 x 108   SELECT  
 PD-204B      -    0.204 μm 1010   SELECT  
 PD-215      -    0.220 μm 3 x 108   SELECT  
 PD-215B      -    0.220 μm 1010   SELECT  
 PD-305      -    0.304 μm 3 x 108   SELECT  
 PD-305B      -    0.304 μm 1010   SELECT  
 PD-365      -    0.360 μm 3 x 108   SELECT  
 PD-365B      -    0.360 μm 1010   SELECT  
 PD-500      -    0.498 μm 3 x 108   SELECT  
 PD-500B      -    0.498 μm 1010   SELECT  
 PD-800      -    0.809 μm 3 x 108   SELECT  
 PD-800B      -    0.809 μm 1010   SELECT  
 PD-802      -    0.802 μm 3 x 108   SELECT  
 PD-802B      -    0.802 μm 1010   SELECT  
 PD1100      -    1.112 μm 3 x 108   SELECT  
 PD1100B      -    1.112 μm 1010   SELECT  
 PD1600      -    1.57 μm 3 x 108   SELECT  
 PD2000      -    2.01 μm 3 x 108   SELECT  
 PD2500      -    2.50 μm 3 x 108   SELECT  
 PD3000      -    3.04 μm 3 x 108   SELECT  
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Specifications:
Particle Composition :Polystyrene
Concentration :3 x 108 or 1010 particles per mL
Particle Density :1.05 g / cm³
Refractive Index :1.59 @ 589nm (25°C)
Fill Volume :50 mL
Content :Polystyrene microspheres in deionized, filtered water
Expiration Date :≥ 12 months
Additives :None
Package Includes :Certificate of Calibration and Traceability to NIST, Material Safety Data Sheet (MSDS)
Storage & Handling :Refrigerate when not in use. Do not freeze the particle suspension. Store upright and keep bottle tightly sealed to avoid contamination.