Theta 300 - High Performance ARXPS Spectrometer
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  Theta 300 - High Performance ARXPS Spectrometer


Theta 300 for the analyzes 300 mm wafers, combining ease of use with revolutionary analytical capability for XPS and ARXPS for thin film analysis

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High Performance Spectrometer for XPS and ARXPS
  • 300 mm and 200 mm wafer handling as standard              
  • Uncompromised small sample handling              
  • Ease of use combined with revolutionary analytical capability for XPS and ARXPS              
  • Full wafer XPS and ARXPS              
  • High throughput              
  • Multiple wafer handling              
  • Full automation              
  • Windows NT based Avantage data system              
  • Designed for a multi-user environment              
  • Non-destructive ultra-thin film analysis 

    For the characterisation of ultra-thin films on wafers up to 300 mm in diameter.
    Theta 300 provides the solutions to the following analytical requirements:

  • Measurement of the composition, uniformity and thickness of ultra-thin films 
  • Rapid identification of sample features on the surface of a sample, providing both elemental and chemical state information 
  • Mapping the distribution of chemical states at the surface
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