MicroXR benchtop platform is a configurable microbeam XRF film thickness and composition measuring tool. This platform includes several X-ray beam and detection options for application flexibility, and provides unparalleled performance in accuracy, precision and reproducibility.

• Mechanical or optical X-ray beam collimation options
• Proportional counter, PIN diode, SDD or Si(Li) X-ray detector options
• Servo driven x-y-z stage with linear encoder option for accurate sample positioning
• Measurement method in accordance with ASTM B 568/ISO3497

Application Performance
The MicroXR platform employs X-ray fluorescence technology in its electronics and software. Application performance specifications ensure that your microbeam XRF system is designed for your specific application and operational purposes:

• Algorithms tools using empirical and fundamental parameters, non-standard and standard-corrected
• Alloy analysis up to a total of 30 elements
• Thickness and composition on one to five deposition layers and one substrate layer simultaneously, to a total of 30 elements per application
• Relative mode calibration for measurement on recessed areas (focus independent)\
• Absorption mode
• Linear excitation mode
• Immersion coating mode
• Density and base correction
• Electroless Ni thickness and composition analysis (optional)

Measurement Performance
The MicroXR platform is designed for unsurpassed accuracy and versatility, including several features to tailor the instrument to specific measurements:

• Application and standards library
• Automated programmable stage measurement
• Automatic beam alignment
• Multiplexed graphical and video signal for single screen operation
• Point-and-shoot sample positioning
• Computer-generated reticle with beam size indicator
• Programmable icons with operator interface designer
• Two- and three-dimensional mapping software
• Full statistics package
• Part number management system with optional bar code reader