Equipped with monocapillary optical collimation, the MicroXR GXR/C model precisely measures tin, palladium and silver structures as small as 25 µm, and gold and nickel structures as small as 40 µm.
Product Detail
MicroXR benchtop platform is a configurable microbeam XRF film thickness and composition measuring tool. This platform includes several X-ray beam and detection options for application flexibility, and provides unparalleled performance in accuracy, precision and reproducibility.
Mechanical or optical X-ray beam collimation options
Proportional counter, PIN diode, SDD or Si(Li) X-ray detector options
Servo driven x-y-z stage with linear encoder option for accurate sample positioning
Measurement method in accordance with ASTM B 568/ISO3497
Application Performance The MicroXR platform employs X-ray fluorescence technology in its electronics and software. Application performance specifications ensure that your microbeam XRF system is designed for your specific application and operational purposes:
Algorithms tools using empirical and fundamental parameters, non-standard and standard-corrected
Alloy analysis up to a total of 30 elements
Thickness and composition on one to five deposition layers and one substrate layer simultaneously, to a total of 30 elements per application
Relative mode calibration for measurement on recessed areas (focus independent)\
Absorption mode
Linear excitation mode
Immersion coating mode
Density and base correction
Electroless Ni thickness and composition analysis (optional)
Measurement Performance The MicroXR platform is designed for unsurpassed accuracy and versatility, including several features to tailor the instrument to specific measurements:
Application and standards library
Automated programmable stage measurement
Automatic beam alignment
Multiplexed graphical and video signal for single screen operation
Point-and-shoot sample positioning
Computer-generated reticle with beam size indicator
Programmable icons with operator interface designer
Two- and three-dimensional mapping software
Full statistics package
Part number management system with optional bar code reader
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