VG Surface Analysis Systems from Thermo Fisher Scientific

Thermo Fisher Scientific offers a range of instruments for surface analysis. 

XPS (ESCA) and scanning Auger electron spectrometers (AES) with world-beating performance 

Sigma Probe

X-ray photoelectron spectrometer (XPS), featuring high performance small area analysis and large sample handling

Theta Probe

X-ray photoelectron spectrometer (XPS), featuring high performance small area XPS, large sample handling and the unique ARXPS feature

Theta 300

X-ray photoelectron spectrometer (XPS), featuring high performance small area XPS, 300 mm wafer handling, advanced software and the unique ARXPS feature

ESCALAB 250

An X-ray photoelectron spectrometer (XPS), featuring superb spectroscopic sensitivity and resolution and fast parallel imaging with ~1 micron resolution

MICROLAB 350

A high resolution Auger Electron Spectrometer (AES), featuring maximum spatial resolution and sensitivity with a spectroscopic performance which is second to none

Flexible, upgradeable, multi-technique systems
The MultiLab systems provide an inexpensive approach to customised multi-technique ESCA systems, offering a choice of XPS using a monochromated X-ray source or a twin anode source, high resolution Auger electron spectroscopy including SAM and SEM, UPS, ISS, rear view LEED, RHEED and STM. The modular design provides the flexibility to construct a customised system from standard parts, including standard chambers for ESCA, sample preparation, deposition and sample entry.

Custom systems designed to meet the specific needs of our customers

Custom Systems

UHV chambers, preparation techniques and analytical equipment