The NicoletTM ECOTM 1000 is a high-performance, FT-IR metrology tool designed to serve the semiconductor manufacturing industry. It can be used for measuring dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in silicon nitride films, epitaxial film thickness, MEMS device thickness, and substitutional carbon and interstitial oxygen levels in silicon wafers. The ECO 1000 can be used with wafers ranging from 100 mm to 200 mm in diameter.
The ECO 1000 comes in several configurations, including manual wafer loading configurations, open cassette sorting configurations, and configurations compliant with SEMI S2 and S8-95 safety and ergonomic specs.
Product Detail
Some of the highlights of all tool configurations include:
Automated wafer centering and alignment using flats or notches
Wafer contact using Teflon-coated vacuum holds on the backside only
High throughput
Exceptionally stable and reproducible measurement results
Powerful FT-IR software toolkit for custom recipe generation
Capable of measuring epitaxial film thickness from 300 nm to 7,500 nm
Transmission and reflectance measurement capability to accommodate the widest range of materials and films
Flexible measurement options from single point measurements to complete wafer mapping options
Easy-to-use, push-button, touchscreen interface with optional keyboard/trackball control
Support of both ASTM and JEIDA standards
Optional SECS/GEM communications software
Class 2 cleanroom ready
The ECO 1000 maintains the proven low cost of ownership and high reliability of our long-running series of ECO tools. Founded on our base of expertise in FT-IR technology, the ECO 1000 is also at the top of its class in performance. Thermo is committed to offering the most expertise and the best possible tools for FT-IR metrology. The ECO 1000 is another affirmation of this commitment.
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