Nicolet ECO FT-IR metrology software is designed to provide an easy-to-use, push-button interface for the ECO FT-IR metrology tools. The ECO software is used to control both process and R&D tools.
The ECO software can be used for the following standard applications:
• Dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.)
• Hydrogen levels in Silicon Nitride films
• Epitaxial film thickness
• MEMS device thickness
• Substitutional Carbon and interstitial Oxygen levels in Silicon wafers
While the ECO software is most commonly used for these standardapplications, it can also be used for a wide range of custom applications.
The ECO software provides an easy-to-use and easy-to-learn interface for operators and a secure method development platform for process engineers and developers.
Some of the highlights of the software include:
• Designed for touchscreen displays
• Provides positive visual and audio feedback on actions
• Password protected method development area and password protected methods
• Supports measurement options from single point measurements to complete wafer mapping options
• Support of both ASTM and JEIDA standards for measurement of substitutional Carbon and interstitial Oxygen
• Support of interferogram subtract and Cepstrum thickness measurement algorithms
• Powerful FT-IR software toolkit for custom recipe development
• Complete calibration diagnostic tools
• Wide variety of powerful quantitative algorithms supporting:
- linear regression
- multiple linear regression (MLR)
- classical least squares (CLS)
- principle component regression (PCR)
- partial least squares (PLS)
• Multiple algorithms for variable pathlength compensation
• Atmospheric water vapor interference correction
• Calibration biasing function for matching results to calibrations derived from other tools or wet methods
• Operates on Windows NT platform
The ECO software maintains Thermo Fisher Scientific's commitment to offering the most expertise and the best possible tools for FT-IR metrology.
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