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  Spatial Resolution in WDS Applications on FESEMs
 Use of a Field Emission Scanning Electron Microscope to analyze submicron-sized defects and particles.
 Use of a parallel beam spectrometer in a field emission scanning electron microscope yields high spatial and peak resolution x-ray microanalysis for beam sensitive or low concentration samples, and samples with severe peak overlaps.
   Products used for this Application
  Product #   Product Name   Image  
 IQLAADGABJFADHMAIZ  MAXray Parallel Beam Spectrometer      Select
 
   Related Technology
  Wavelength Dispersive X-Ray Spectroscopy (WDS/WDX)