The MAXray has the ability to resolve the silicon K?₁ peak from the tungsten M?₁ and M?₁, providing definitive identification of the elements. Because of the lower resolution of an energy dispersive spectrometer, the silicon and tungsten data form one large peak, and cannot provide definitive visual identification, while the MAXray forms three distinct peaks.

With the resolving ability and high signal-to-noise, the MAXray is far superior for identifying particles that could not be identified and profiled with an energy dispersive spectrometer alone.

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