Automated Analysis on the Sigma Probe, Theta Probe and Theta 300 instruments
Source-defined small area analysis and a precision sample stage makes multi-sample or multi-point analysis routine on the Theta Probe, Sigma Probe and Theta 300
Automated Analysis Source-defined small area analysis and a precision sample stage makes multi-sample or multi-point analysis routine on the Theta Probe, Sigma Probe or Theta 300.
Optical view of bond pad in the analysis position
Survey spectrum from a single bond pad
High resolution spectrum from a single bond pad
Automated analysis and quantification of 70 bond pads showing that some have a high fluorine concentration