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  Automated Analysis on the Sigma Probe, Theta Probe and Theta 300 instruments
 Source-defined small area analysis and a precision sample stage makes multi-sample or multi-point analysis routine on the Theta Probe, Sigma Probe and Theta 300
 Automated Analysis
Source-defined small area analysis and a precision sample stage makes multi-sample or multi-point analysis routine on the Theta Probe, Sigma Probe or Theta 300.

Bond Pad
Optical view of bond pad in the analysis position

Survey Spectrum
Survey spectrum from a single bond pad

High Resolution Spectrum
High resolution spectrum from a single bond pad

Quantification
Automated analysis and quantification of 70 bond pads showing that some have a high fluorine concentration

   Products used for this Application
  Product #   Product Name   Image  
 IQLAADGAAFFAESMALA  Sigma Probe - Surface Analysis Instrument      Select
 IQLAADGAAFFAFKMAMA  Theta 300 - High Performance ARXPS Spectrometer      Select
 IQLAADGAAFFAFLMAMC  Theta Probe - High Performance ARXPS Spectrometer      Select
 SID-15968  VG Surface Analysis Systems from Thermo Fisher Scientific      Select