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  Chemical State Maps on the Theta Probe and Theta 300
 The multi-channel detector on Theta Probe allows the collection of up to 112 energy and 96 angle channels at each point on a line or map
 Chemical State Maps
The multi-channel detector on Theta Probe allows the collection of up to 112 energy and 96 angle channels at each point on a line or map
Spectra or ARXPS data can be derived retrospectively from any area in the map or even from a single pixel.
Maps can be constructed following the application of advanced data processing techniques such as Non-Linear Least Squares Fitting (NLLSF). This enables accurate mapping of chemical states.
Collection of angle resolved data simultaneously with the spectral data allows thickness maps or sub-surface images to be constructed.
The Theta Probe uniquely combines mapping with ARXPS. This capability adds a whole new dimension to XPS mapping.

Tantalum Images
Images of oxidised Ta (left) and metallic Ta (right) constructed following the application of Target Factor Analysis and NLLSF to snapshot spectra at each pixel

Tantalum
Spectrum from an area of oxidised tantalum showing both metallic and oxide components

Tantalum
Spectra reconstructed from the areas indicated on the two maps above
   Products used for this Application
  Product #   Product Name   Image  
 IQLAADGAAFFAESMALA  Sigma Probe - Surface Analysis Instrument      Select
 IQLAADGAAFFAFKMAMA  Theta 300 - High Performance ARXPS Spectrometer      Select
 IQLAADGAAFFAFLMAMC  Theta Probe - High Performance ARXPS Spectrometer      Select