Fast Parallel X-ray Photoelectron Imaging
Using the parallel imaging technique these chemical state images were acquired in only a few minutes with a resolution of about 1µm. This is the only technique which will provide XPS images with such a high resolution.
The ESCALAB 250 can acquire images having a field of view from 120µm to 8mm
The images were taken from a semiconductor device structure and show silicon in each of two chemical states, the element and the oxide.
An XPS image of elemental silicon showing a field of view of 250 µm and a resolution of 1µm |
An XPS image of oxidised silicon showing showing the same field of view and resolution. |
An overlay of the two silicon images | |
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