Auger Electron Spectroscopy using a Field Emission Electron Source
The field emission electron gun provides maximum sensitivity at high spatial resolution
The FEG1000 gun provides <95nm resolution, delivering unrivalled performance for AES, SEM, SAM and RHEELS.
| Titanium Nitride Coating on Copper
Images taken from a 5mm field of view, using 2.7nA of beam current at 5keV. The spatial resolution of these images is 100nm.
Top left - SEM
Top right - copper
Bottom left - titanium
Bottom right - copper/titanium overlay
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Auger spectra from a hard titanium nitride coating on a copper substrate
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