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  Film Thickness Measurement using Angular Resolved XPS
 Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS)is used to measure the thickness and chemical composition of ultra-thin films
 Film Thickness Measurement
Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS) is used to measure the thickness and chemical composition of ultra-thin films

Silicon
One angle channel (25°) from each of four silicon samples showing the effect of oxide thickness on the Si 2p spectrum


Linearity
There is good linearity between known and measured oxide thicknesses
   Products used for this Application
  PRODUCT #   Product Name   Image  
 IQLAADGAAFFAFLMAMC  Theta Probe - High Performance ARXPS Spectrometer      Seleccionar
 IQLAADGAAFFAFKMAMA  Theta 300 - High Performance ARXPS Spectrometer      Seleccionar