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  Multiple Thin Layers Analysis by Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS)
 ARXPS may be applied to multi-layered samples to determine the thickness and chemical composition of each layer
 Multiple Thin Layers
Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS) may be applied to multi-layered samples to determine the thickness and chemical composition of each layer

Parallel Detection
Parallel detection of the Si 2p region of a SiO2/Si3N4/Si sample

Layer Thicknesses
Layer thicknesses, determined by Theta Probe, from four oxide/nitride samples

   Products used for this Application
  Product #   Product Name   Image  
 IQLAADGAAFFAFKMAMA  Theta 300 - High Performance ARXPS Spectrometer      Select
 IQLAADGAAFFAFLMAMC  Theta Probe - High Performance ARXPS Spectrometer      Select