ARXPS may be applied to multi-layered samples to determine the thickness and chemical composition of each layer
Multiple Thin Layers Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS) may be applied to multi-layered samples to determine the thickness and chemical composition of each layer
Parallel detection of the Si 2p region of a SiO2/Si3N4/Si sample
Layer thicknesses, determined by Theta Probe, from four oxide/nitride samples