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  Small Area XPS Analysis on the Sigma Probe and Theta Probe
 The microfocusing X-ray monochromator provides user-selectable spatial resolutionThe ultimate spatial resolution is <15 ?m
 Small Area XPS
The microfocusing X-ray monochromator provides user-selectable spatial resolution
The ultimate spatial resolution is <15 ?m

Using the source to define the analysis area maximises sensitivity. This example is from a tungsten track on a silicon substrate. The spectrum was acquired with a spatial resolution of 13 ?m.

Tungsten Track

Tungsten Spectra

   Products used for this Application
  PRODUCT #   Product Name   Image  
 IQLAADGAAFFAFLMAMC  Theta Probe - High Performance ARXPS Spectrometer      选择
 IQLAADGAAFFAESMALA  Sigma Probe - Surface Analysis Instrument      选择
 IQLAADGAAFFAFKMAMA  Theta 300 - High Performance ARXPS Spectrometer      选择