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  Small Area Angle Resolved XPS on Theta Probe and Theta 300
 Theta Probe provides the only reliable method for ARXPS on small features. There is no need to tilt the sample, therefore the analysis area, analysis position, charge compensation conditions and the energy resolution remain constant.
 Small Area Angle Resolved XPS
Theta Probe provides the only reliable method for ARXPS on small features

There is no need to tilt the sample, therefore:- 

  • The analysis area remains constant       
  • The analysis position is constant       
  • The charge compensation conditions are constant       
  • The energy resolution is constant.

Emission Angle
Analysis area is independent of emission angle using Theta Probe. With other methods, such as lens-defined ARXPS, the analysis area changes significantly as illustrated above
(Click on the image for a larger picture)

Snapshot
Al 2p snapshot spectra at a range of angles from a 100 mm bond pad. All angles collected simultaneously.

 
   Products used for this Application
  Product #   Product Name   Image  
 IQLAADGAAFFAFKMAMA  Theta 300 - High Performance ARXPS Spectrometer      Select
 IQLAADGAAFFAFLMAMC  Theta Probe - High Performance ARXPS Spectrometer      Select