Examples of how Fourier Transform Infrared (FT-IR) spectroscopy is employed in the quality control of CVD films are abundant in the literature, and one of the more common applications is the analysis of boron and phosphorus in borophosphosilicate glass (BPSG). The success of this application and others has allowed FT-IR metrology systems to become common tools in the fab.

Infrared analysis is well suited to this environment due to its ability to probe these samples in a non-destructive and non-contaminating fashion. It also yields very detailed information to confirm that the process parameters are within specification limits.