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| FT-IR Measurement of PSG and BPSG Films: IR Principles and K-matrix Approach |
| FT-IR Measurement of PSG and BPSG Films: IR Principles and K-matrix Approach |
| The principles of infrared spectroscopy in the analysis of boron and phosphorus dopants in silicate glass as inter-layer dielectric films, and a discussion of using the K-matrix technique. |
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