The ECO™ 3500 from Thermo Scientific features fully automated handling of wafers up to 300 mm. It measures dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in silicon nitride films, epitaxial film thickness, MEMS device thickness, and substitutional carbon and interstitial oxygen levels in silicon wafers.
1 Artículos Total 7,000.00 USD 
