Thermo Scientific :Theta 300 - High Performance ARXPS Spectrometer

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Theta 300 - High Performance ARXPS Spectrometer

	Theta 300 for the analyzes 300 mm wafers, combining ease of use with revolutionary analytical capability for XPS and ARXPS for thin film analysis

Applications :

	Small Area Angle Resolved XPS on Theta Probe and Theta 300 Small Area XPS Analysis on the Sigma Probe and Theta Probe Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS) Analysis of Polymers Multiple Thin Layers Analysis by Angular Resolved X-ray Photoelectron Spectroscopy (ARXPS) Film Thickness Measurement using Angular Resolved XPS Elemental information and Chemical State Distribution obtained by XPS Mapping on the Sigma Probe and Theta Probe Automated Analysis on the Sigma Probe, Theta Probe and Theta 300 instruments Chemical State Maps on the Theta Probe and Theta 300

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