ARXPS for analysis of thin multi-layered structures. Electrons emitted at different angles provide both depth and chemical state information	The 2-D detector collects spectroscopic and angular information simultaneously (Click on the image for a larger picture)

Intensity map from the 2-D detector. The analyser is tuned to the Si 2p peak from a thin oxide layer on a silicon wafer. The horizontal axis displays the oxide and element peaks and angle resolved information is available in the vertical axis	Multidimensional data can be displayed in many ways during and after acquisition using the advanced tools in the Avantage data system