- Rapid and effective sample mounting
- Small volume load lock chamber for fast sample introduction
- 5-axis automated stage as standard
- 70 x 70 mm analysis area for large or multiple samples
- Accommodation of samples up to 25 mm high and up to 98 mm wide
- Zoom microscope and probe light for precise alignment at the analysis position.
- Azimuthal rotation for high resolution depth profiles.
- Heating and cooling options
70 mm x 70 mm sample holder loaded with a variety of samples for analysis. Samples can be up to 25 mm thick
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A wide range of sample sizes can be accommodated, including a standard 4 inch wafer or a 96 mm hard disc.
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