Energy and Wavelength Dispersive Spectroscopy
Energy Dispersive and Wavelength Dispersive X-ray Spectroscopy techniques capture elemental information (characteristic X-rays) during the interaction between the energy beam in an electron microscope and its sample.
X-ray microanalysis uses energy dispersive (EDS) and wavelength dispersive spectroscopy (WDS) in the elemental characterization of materials in electron microscopes.
A related technique, Electron Backscattered Diffraction measures diffraction patterns from backscattered electrons for to characterize the crystalline structure (phase identification and crystal orientation) of materials. |
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